Single Stage Regulator high flow-HPR3 series
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  • Single Stage Regulator high flow-HPR3 series

 Feature：

● For general application and high purity gas distribution system.

● High-Flow(HF)version CV1.1 available

● Standard SS316L,HastelloyC-22 diaphragm(option available)

● Available in panel and bracket mounts

● Assembled and packaged in Class 100 and Class 10 cleanrooms

● Each product is 100%helium&function tested before leaving the factoryand is accompanied by a test report for quality traceability 
 

Specification

Inlet Pressure Ranges

Vacuum-1700 psig(117 bar)(Standard) 
Vacuum-1700 psig(117 bar)(HF version) 
Vacuum-300 psig(20.6 bar)(FC version) 
Vacuum-3500 psig(241 bar)(HP version)

Proof Pressure(Inlet)

150%of working pressure

Burst Pressure

300%of working pressure

OutletPressure Ranges

1~30 psig(2.1 bar) 
1~60 psig(4.1 bar) 
2~100 psig(6.9 bar) 
5～150 psig(10.3 bar)

Fow Capacity(Cv)

Standard:0.09   HF version:1.1FC  version:0.65

Operating Temperature

PCTFE

-40℃~80℃

PI

-20℃~80℃

Leak Rate(Helium)

Inboard leakage

2×10-11 Pa m³/s

Outboard leakage

2×10-10 Pa m³/s*3)

Across the seat leak

4×10-9 Pa ·m3/s*4)

Internal SurfaceFinish

General Application

High Purity

Ra≤20μin. (0.5μm) 
Ry≤6.0μm

Ra≤10μin. (025μm) 
Ry≤3.0um

 

Flow Chart

 

 

Keywords

Machining

Gas Pressure Regulators

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