Feature：
● Single stage pressure regulation
● Suitable for high purity gases: surface finish ≤ 20Ra(0.5μm)
● High quality valves with threaded fittings
● Buit-in 10 micron filter
● Each panel is pressurized with inert gas and tested for leaks with a helium leak detector
● High-pressure isolation valves provide secure and precise gas flow control for demanding applications.
● High-pressure purge facility enables efficient purging of high-pressure lines to prevent contamination.
● Process line isolation valve enables hassle-free maintenance or repairs without interrupting the entire system.
Purpose
Gas panel HPS5 Series is designed for delivery of non-corrosive non-toxic
gases and gas mixtures of purity class up to 6.0 (99,9999%) in gas distribution
systems with one gas cylinders,where slight pressurevariation is acceptable.
General Information
Gas panel HPS5 Series contains a single-stage diaphragm pressure
regulators and three diaphragm isolation valves mounted on a stainless steel
base and connected by threaded 1/4” fittings*.
Applications:
• Chemical industry
• Microelectronics
Specification
Ports | 1/4” NPT Female |
Flow coefficient Cv | Available from 0.05,0.14,0,17 |
Purity Grade | 6.0 (99.9999%) |
Max leakage(He) | 1x 10 -10 Pa·m3/s 1x 10 -9 sccs |
Gas Properties | Corrosive, toxic |
Material（body) | SS AISI 316L |
Material(Diaphragm) | Elgiloy/Hastelloy-22 |
Material（seal) | PCTFE |
Material（seat) | PCTFE |
Inlet Pressure (bar/psi) | 15, 60, 300 / 220, 870, 4350 (subject to cylinder connection) |
Outlet pressure (bar/psi) | 10 (150) |
Gauges | 50mm (2”) Diameter |
Temperature Range | -40℃~80℃ |
Weight,no more than | 2.1 KG |
Applications | Industry, Refrigeration, Analytical Laboratories,Food and Beverages |
Keywords
High-Purity Single-Stage Manual Gas Manifold-HPS5 Series
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