Feature:
- For high purity gas distribution system .
- Combining DV1 and DV2 series diaphragm valves into one,
the dead zone is minimized through the common flow path,
and the degassing performance is excellent. - Standard SS316L,HastelloyC-22 diaphragm(option available) .
- While maintaining the basic performance of the original valve,
the most compact piping system can be designed through the
combination of the same or different types
Assembled and packaged in Class 100 and Class 10 cleanrooms .
Specification
Size | 1/4” | 1/2” |
Cv Value | 0.22 | 0.7 |
Orifice Size(mm) | 4 | 7 |
Max.Working Pressure | 3000 psig(207 bar)/250psig(17.2 bar) | |
Max.Working Temp. | PCTFE | -40℃~80℃ |
PFA | -10℃~150℃ | |
Vespel | -10℃~150℃ | |
| 4x10⁻¹⁰ Pa·m³/s | |
| 4x10⁻¹⁰ Pa·m³/s | |
Particle Inspection | No Countt | |
Keywords
Block Pneumatic Diaphragm Valves-DV6 Series
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