High Flow Diaphragm Valves-DV7 Series
+
  • High Flow Diaphragm Valves-DV7 Series

Feature:

● The raw materials meet international standards and 
    relevant standards of the semiconductor industry.
 ● Large diameter diaphragm offers enhanced pressure 
   sensitivity
● Fully contained seat to provide excellent resistance to 
   swelling and contamination.
● Hastelloy C-22 and elgiloy alloy materials provide 
   high strength and corrosion resistance.
● Assembled and packaged in Class 100 and Class 10 
   cleanrooms, suitable for High purity and Ultra High purity 
   semiconductor industries.
● Each product is 100% helium tested before leaving the factory 
   and is accompanied by a test report for quality traceability.


Specification

Size

3/4”

1”

Cv Value

1.8 

0.7 

Orifice Size(mm)

20 

20 

Max.Working Pressure

1300psig(90 bar)

3000psig(207 bar)

Max.Working Temp.

PCTFE

-10℃~80℃

PFA

-10℃~150℃

Vespel

-10℃~150℃


Internal Leakage 
 

4x10⁻¹⁰ Pa·m³/s


External Leakage 
 

4x10⁻¹⁰ Pa·m³/s

Particle Inspection 
Pressure :30~60 psi N₂Gas 
Sample Volume:1 CFM/0.1 μm and Larger

No Count

 

Get A Quote

Note: Please leave your contact information and our professionals will contact you as soon as possible!

Submit