Manual Low Pressure Diaphragm Valves-DV1 Series
Manual Low Pressure Diaphragm Valves-DV1 Series
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  • Manual Low Pressure Diaphragm Valves-DV1 Series
  • Manual Low Pressure Diaphragm Valves-DV1 Series

Feature:

● The raw materials meet international standards and 
   relevant standards of the semiconductor industry.

● Excellent purge characteristic is realized by minimizing 
   the internal volume
● Fully contained seat to provide excellent resistance to 
   swelling and contamination
● Hastelloy C-22 and elgiloy alloy materials provide 
   high strength and corrosion resistance
● Assembled and packaged in Class 100 and Class 10 
   cleanrooms, suitable for High purity and Ultra High purity 
   semiconductor industries
● Each product is 100% helium tested before leaving the factory 
   and is accompanied by a test report for quality traceability.


Specification

Size

1/4”

3/8”

1/2”

3/4”

Cv Value

0.27

0.7 

0.7 

0.7 

Orifice Size(mm)

4 

7 

7 

7 

Max.Working Pressure

250Psig(17.2 bar)

Max.Working Temp.

PCTFE

-40℃~80℃

PFA

-10℃~150℃

Vespel

-10℃~150℃

Internal Leakage 
 

4x10⁻¹⁰ Pa·m³/s

External Leakage 
 

4x10⁻¹⁰ Pa·m³/s

Particle Inspection 
Pressure:30~60 psi N₂Gas 
Sample Volume:1 CFM /0.1 um and Larger

No Count

 

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