Feature:
● The raw materials meet international standards and
relevant standards of the semiconductor industry.
● Excellent purge characteristic is realized by minimizing
the internal volume
● Fully contained seat to provide excellent resistance to
swelling and contamination
● Hastelloy C-22 and elgiloy alloy materials provide
high strength and corrosion resistance
● Assembled and packaged in Class 100 and Class 10
cleanrooms, suitable for High purity and Ultra High purity
semiconductor industries
● Each product is 100% helium tested before leaving the factory
and is accompanied by a test report for quality traceability.
Specification
Size | 1/4” | 3/8” | 1/2” | 3/4” |
Cv Value | 0.22 | 0.7 | 0.7 | 0.7 |
Orifice Size(mm) | 4 | 7 | 7 | 7 |
Max.Working Pressure | 3000 Psig(207 bar) | |||
Max.Working Temp. | PCTFE | -40℃~80℃ | ||
PFA | -10℃~150℃ | |||
Vespel | -10℃~150℃ | |||
| 4x10⁻¹⁰ Pa·m³/s | |||
| 4x10⁻¹⁰ Pa·m³/s | |||
Particle Inspection | No Count | |||
Keywords
Pneumatic High Pressure Diaphragm Valves-DV4 Series
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