Ultra High-Purity In-Line Point of Use-UHPU2 Series
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  • Ultra High-Purity In-Line Point of Use-UHPU2 Series

Feature:

● Full range of inlet and outlet fittings

● High output pressure stability

● Suitable for high purity gases:  surface finish ≤ 10Ra(0.25μm)    
● High quality valves with threaded fittings

● Buit-in 5 micron filter

● Each panel is pressurized with inert gas and tested for leaks with a helium leak detector  

● High-pressure isolation valves provide secure  and precise gas flow control for demanding applications.  

● High-pressure purge facility enables efficient purging of high-pressure lines to prevent contamination.   

● Process line isolation valve enables hassle-free maintenance or repairs without interrupting the entire system. 

 

Purpose

Point of use HPU2 Series is designed for delivery for secondary    
pressure gas control of corrosive, toxic and high purity gases up to    
grade 6.0 purity (99.9999%), on gas distribution systems.   
 

General Information

Point of use HPU2 Series contains a single-stage diaphragm pressure    
regulators and one diaphragm isolation valves mounted on a stainless steel   
base and connected by 1/4” VCR fittings*.    
Applications:   
• Chemical industry   
• Microelectronics


Specification

Ports

1/4” VCR 

Flow coefficient Cv

Available from 0.05,0.14,0,17

Purity Grade

6.0 (99.9999%)

Max leakage(He)

1x 10 -10 Pa·m3/s 

1x 10 -9 sccs

Gas Properties

Corrosive, toxic

Material(body)

SS AISI 316L

Material(Diaphragm)

Elgiloy/Hastelloy-22

Material(seal)

PCTFE

Material(seat)

PCTFE

Inlet Pressure (bar/psi)

15, 60, 300 / 220, 870, 4350 (subject to cylinder connection)

Outlet pressure (bar/psi)

10 (150)

Gauges

50mm (2”) Diameter

Temperature Range

-40℃~80℃

Weight,no more than

2.1 KG

Applications

Industry, Refrigeration, Analytical Laboratories,Food and Beverages

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