Feature：
• For general application and high purity gas distribution system.
• The diaphragm and poppet are integrated.
• Standard SS316L,HastelloyC-22 diaphragm(option available)
• Available in panel and bracket mounts
• Assembled and packaged in Class 100 and Class 10 cleanrooms
• Each product is 100%helium&function tested before leaving the factoryand is accompanied by a test report for quality traceability
Specification
Inlet Pressure Ranges | Vacuum-300 psig(20.6 bar) | ||
Proof Pressure(Inlet) | 150%of working pressure | ||
Burst Pressure | 300%of working pressure | ||
Outlet Pressure Ranges | 1～30 psig(2.1 bar) | ||
Flow Capacity(Cv) | 0.45 | ||
Operating Temperature | PCTFE | -40℃~80℃ | |
PI | -20℃~80℃ | ||
Leak Rate(Helium) | Inboard leakage | 2x10-11 Pa ·m³/s | |
Outboard leakage | 2×10-10 Pam³/s*3) | ||
Across the seat leak | 4×10-9 Pa ·m³/s*4) | ||
Internal Surface Finish | General Application | High Purity | |
Ra≤20μin. (0.5μm) | Ra≤10μin. (0.25μm) | ||
Flow Chart
Keywords
Single Stage Regulator Integrated Structure of Diaphragm and poppet -HPR4 Series
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